CVD-LRQ Reactor
Labor-Reactor for high-class control
Labor-Reactor for process simulation

CVD-LRQ Reactor

CVD-LRQ Reactor - Benefits

  • Performance reliability by integrated Gas sensors
  • Developed for PLUG&PLAY installation
  • Camber inside fused silica - max 1 bar operating pressure
  • Electrode water-cooled
  • Fully automatic process sequence
  • Integrated safety system
  • Outer camber stainless steel (optional: silver coated)
  • High gas temperature
  • Max. dimension of the silicon rod 30 mm
  • Silicon rod length 200 to 300 mm
  • Variable hook up connection for all media for top or bottom


CVD-LRQ Reactor - Performance

  • Operating pressure reactor: ~ 1 bar
  • Operating temperature: max. 1150 ° C
  • Slim rod length: 2 x 200 mm or 2 x 300 mm
  • Slim rod dimension: 6 x 6 mm / 7 x 7 mm / 8 x 8 mm
  • Air jet: 11,5 m³ / h
  • Ultimate diameter: 30 mm
  • Consumption H2: ?
  • Consumption SiHCI3: ?
  • Depositions time: 20 mm diameter: ~ 12 hours, 30 mm diameter: ~ 18 hours


CVD-LRQ Reactor - Technology

  • Labor-Reactor for high-class control (CVD-LRQ)
  • Labor-Reactor for process simulation (CVD-LRT)
  • Labor-Silan-Reactor
  • Slim rod welding system
  • Scrubber for CVD Reactors and Lab technology
  • Camber cleaning system
  • Polysilicon equipment
  • Slim rod saw
  • laboratory equipment

 
CVD-LRQ Reactor - Electrical details

  • Power supply, three phases 230/400 V (+ - 15%) 80 A 50/60 Hz
  • Network TN-C-S grounded PEN
  • WinCC user interface
  • Fully automatic process sequence


CVD-LRQ Reactor - Hook up connection

  • Cooling water supply: Swagelok ½“ male
  • Cooling water return: Swagelok ½“ male
  • Instrument air: Swagelok ½“ male
  • Nitrogen: VCR ¼“ male
  • Hydrogen: VCR ¼“ male
  • TCS / STC: VCR ¼“ male
  • Scrubber 1: Swagelok ½“ male
  • Scrubber 2: G 2“ female
  • Cabinet flushing pipe to scrubber 2: Swagelok 2" AG
  • Pipe connation from the lab to the reactor  in ¾”
  • Pipe quality in stainless steel 1.4404 electro polished


CVD-LRQ Reactor - Documentation

  • Installations manual
  • P&ID
  • List of spare parts
  • Maintenance instructions
  • User manual
  • Safety instructional
  • Software-manual
  • Final acceptance and test record
  • Training-CD
  • Certificate


CVD-LRQ Reactor - Installation

  • If our customer confirms that everything on side is ready for commissioning we will send our engineers on side.
  • Commissioning of the reactor by our engineers
  • handover of the reactor to customer after successful test
  • Training for user and service personal


CVD-LRQ Reactor - Media

  • Cooling water DI-water quality: 10-20 uS/cm
  • Cooling water flow (via 5 µm filter): 8,0 (± 0,5) l/min
  • Cooling water pressure: 3,0 (± 0,5) barg
  • Cooling water temperature: 20,0 (± 5,0) °C
  • Compressed air: 8,0 (± 0,5) barg
  • Clean dry air: 8,0 (± 0,5) bar
  • Nitrogen 5,0 ppm: 8,0 - 10,0 barg
  • Hydrogen 6,0 ppm: 6,0 - 8,0 bar
  • TCS (fluid) min 99,8: 5,0 - 7,0 bar
  • Exhaust: Unpressurized scrubber 1, flow ~ 3,0 m³/h
  • Flushing: Unpressurized scrubber 2,  flow ~ 180 m³/h


CVD-LRQ Reactor - Customer info

    Exhaust and safety pipe
  • Variable hook up connection for all media on top or bottom
  • Safety control system: if a problem occurs all valves are switching to security position and the system will be flushed with nitrogen.
  • standalone scrubber system
  • N2 purge and security purge beyond scrubber 2
  • The process is automatically controlled by PLC (S7)
  • Providing a laboratory P&ID
    Hard- and Software components
  • Siemens S7 PLC System Visualisation via WinCC Flexible
  • Type Siemens S7-300 or Siemens S-1500