Know-how

Slurry Mixing Systems

Our slurry mixing and supply systems allow for batch preparation from small volumes up to 3,000 liters with a single system.

  • Mixing, Transfer, Supply, and Day Tank Modules
  • Dosing via Weighing System
  • < 0.5% Mixing Accuracy
  • 3,000 l/h Mixing Capacity
  • Plastic Construction

PUE Solutions

Chemistry & Slurry.

This modular polishing slurry mixing and supply system includes a dosing and mixing tank, filtration and transfer pumps, a buffer tank, and supply pumps. The system is designed to prepare and continuously supply the material needed for polishing silicon wafers.

This modular polishing slurry mixing and supply system includes a dosing and mixing tank, filtration and transfer pumps, a buffer tank, and supply pumps. The system is designed to prepare and continuously supply the material needed for polishing silicon wafers.