Know-how

Slurry Recycling.

PUE Systems, a leading partner in the semiconductor industry, continuously meets customer demands. Our new slurry recycling system enables significant cost savings by reusing suspension that was previously discarded and replaced.

  • Stand-alone System
  • Add-on Polishing Slurry
  • Compact Footprint
  • Chemical Savings
  • Cost Reduction

PUE Solutions

Slurry Recycling.

This compact slurry recycling system can be easily integrated into the polishing process. It collects and filters the slurry coming from the polisher. pH monitoring determines whether the recycled slurry can be reused for a certain period.

If not reusable, the recycled slurry is automatically blended with fresh slurry through a chemical “spiking” process to restore its effectiveness for polishing.

Thanks to efficient recovery with low energy consumption, the slurry can be reused in the polishing process in a cost-effective manner. This not only reduces production costs but also significantly lowers environmental impact.