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TMAH Onside Dilution System

Since 2006, PUE ODS (onside dilution system) systems for TMAH are successfully implemented on the market. Our ODS was designed to dilute concentrated TMAH precisely to the requested dilution. Highest accuracy and reproducibility of the dilution is achieved by multiple step dosing and measurement. The target value is verified by an independent metrology module.

In addition, surfactant dosing is available. After volumetric dosing and mixing, the target value is verified by an additional independent metrology module.